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DFC Digital Mass Flow Controller
- digital and analog modes operate
- programmable flow configurations
- available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
- maximum pressure of 1000 psig (70 bars)
- multi-drop capability of up to 256 units
- stores calibration data for up to 10 gases
- totalizer indicates total gas quantity
- alarm limits for high and low gas flow
- conversion factors for up to 256 gases
- auto tune function for optimum control response
- self diagnostic tests